Unfortunately the results of an out-of-space condition are unpredictable.
What you may do is to check each VM individually to find out whether a simple restore of the latest .vmx file (or recreation based on the latest vmware.log files) is sufficient or if there's more to do. Can you provide the details of one of the VMs as an example? A complete list of files in the VMs folder (preferably the output of ls -lisa from the command line) as well as the vmware*.log files in the VMs folder would be a good start. Please compress/zip the files and attach the archive to a reply post using the advanced editor.
André